Browse Lessons

5. Wafer Cleaning and Gettering - Contamination Measurement Techniques

12. Ion Implantation and Annealing - Analytic Models and Monte Carlo

21. Etching - Poly Gate Etching, Stringers, Modeling of Etching

6. Oxidation and the Si/SiO2 Interface. Deal/Grove Model, Thin Oxide Models

7. Oxidation and the Si/SiO2 Interface. 2D Effects, Doping Effects, Point Defect

22. Silicides, Device Contacts, Novel Gate Materials

4. Wafer Cleaning and Gettering (cont.)

18. Thin Film Deposition and Epitaxy - CVD Examples and PVD

11. Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques

23. Growth and Processing of Strained Si/SiGe and Stress Effects on Devices

15. Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail

8. Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

19. Thin Film Deposition and Epitaxy - Modeling Topography of Deposition

13. Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED

9. Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

3. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)

20. Etching - Introduction

17. Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

14. Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction

10. Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

16. The SUPREM IV Process Simulator

Lecture 6: Thermionic power conversion

Lecture 5: Current research on thermoelectric materials

Lecture 9: Solar concentration and solar thermal technology