SemiFA: An Agentic Multi-Modal Framework for Autonomous Semiconductor Failure Analysis Report Generation

arXiv:2604.13236v1 Announce Type: cross Abstract: Semiconductor failure analysis (FA) requires engineers to examine inspection images, correlate equipment telemetry, consult historical defect records, and write structured reports, a process that can consume several hours of expert time per case. We present SemiFA, an agentic multi-modal framework that autonomously generates structured FA reports from semiconductor inspection images in under one minute. SemiFA decomposes FA into a four-agent Lang